Production Support Division

Overhaul Business

Through high-quality overhauls and repairs of devices and equipment, we can help improve your rate of operation and reduce particle contamination. At the same time, through reasonable pricing, we can contribute to your cost reduction.

Advantages for the customer

1．Lower Costs
We offer cost merits with our low-cost service.

2．Reduced tool downtime, labor time
By simply swapping out your tool with one we have already overhauled for you,it is possible to reduce tool downtime and labor time which occurs when disassembling and reassembling on-site.

3．Quality Stabilization
We perform running tests and leak checks, so after installing the equipment, there is less chance of issues with quality caused by defects or foreign material, for example.

1.Vacuum Pump Overhauls

Real results

Work-flow example

Parts example

Parts rejuvenation example

2.Turbo Pump Overhauls

3.Vacuum Valve Overhauls

4.Ion Source Head Overhauls

5.Robot Overhauls

6.Printed Circuit Board Repairs

Measurement Business

Measurement Analysis（X-ray CT scanner）

Relationship between X-ray power-output and resolution

Relationship between imaging scope and high-resolution

Example : Internal defects, damage

Example : Magnification and Resolution

Example : Magnification and Resolution (aluminum die-cast)

Example : Classifying

Example : Magnification and Resolution (Aluminum die-cast)

Example : LSI SOP View

Example : Controller view

Field Support Business

Even outside Japan, we can provide service in cooperation with our subsidiary companies based in the US and Taiwan.

We can propose and deliver engineering staff, business outsourcing, and all kinds of support which fits the customer’s needs.

▼Worldwide Network